Problem: Wavelength has been scaling at a slower rate than the IC feature size.

问题: 光学波长微缩的速度跟不上IC尺寸微缩的速度.

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The reduction of IC feature size constantly prompts the research and development of new lithography technique.

集成电路特征尺寸的缩小,不断促进新一代光刻技术的研究和开发.

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Resolution - the smallest feature size on your object that the imaging system can distinguish.

分辨率 - 成像系统能够分辨你的目标物上最小的特征大小.

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