MEMS ( Microelectromechanical Systems ) has developed rapidly in recent years.

近几年,微机电系统 ( MicroelectromechanicalSystems, 简称MEMS) 技术得到了迅速发展.

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The paper introduces pulsed laser micromachining and its application in microelectromechanical systems ( MEMS ).

介绍了脉冲激光微加工技术及其在微机电系统(MEMS ) 加工中的应用.

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The characteristics and state - of - the - art of the microsensors based on microelectromechanical system ( MEMS ) technologies are introduced.

介绍了基于微机电系统(MEMS ) 技术的微型传感器的特点和发展概况,以及应用在汽车发动机控制、安全系统等方面的微型传感器的原理、特点和主要技术参数.

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PZT has been extensively used in many areas such as microelectronics, optoelectronics and microelectromechanical systems ( MEMS ) .

PZT薄膜广泛应用于微电子学 、 光电子学、微电子机械系统等领域,可作为铁电存储器、传感器、声 表面波器件 和各种精密仪器控制部分的理想材料.

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Computer aided design ( CAD ) of Microelectromechanical systems ( MEMS ) is a significant foundation for commercialization of MEMS.

微机电系统 ( MEMS ) 的计算机辅助设计 ( CAD ) 是MEMS实现商品化的重要基础.

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The features, theory basis and technology foundation of microelectromechanical system ( MEMS ) are reviewed.

概述了微电子机械系统 ( MEMS ) 的特点 、 理论和技术基础.

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