Mechanism, characteristic and application of excimer laser micromachining are introduced.

介绍了准分子激光微加工的机理 、 特点和应用.

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Objective To establish direct - write laser method for micromachining immunoassay microfluidic chip.

目的建立微流控芯片的CO_ 2激光直接微加工方法.

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A fabrication process has been developed to a polymer micro tip arrays using micromachining.

采用微加工工艺制备出一种聚合物微锥阵列.

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The paper introduces pulsed laser micromachining and its application in microelectromechanical systems ( MEMS ).

介绍了脉冲激光微加工技术及其在微机电系统(MEMS ) 加工中的应用.

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Silicon integrated thin film microelectrode based electrochemical sensor devices has been fabricated using silicon micromachining techniques.

研究讨论了硅一体化微机械结构型薄膜微电极电化学传感器件的稳定性及其相关的电化学问题.

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A double - ended tuning fork resonator is presented , which is fabricated by silicon bulk micromachining technology.

应用体硅微机械加工技术, 制作了一种双端固定音叉式谐振器.

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Back etching type AIN film bulk acoustic resonators were fabricated using silicon bulk micromachining technique.

采用体硅微细加工工艺制备了背空腔型AIN薄膜体声波谐振器.

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Thick resist lithography is one kind of micromachining techniques fabricating relief microstructures at great depth.

厚层抗蚀剂光刻是一种制作深浮雕结构的微细加工技术.

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A novel MEMS inertia micro - switch has been designed basing on non - silicon surface micromachining technology.

基于 非 硅表面微加工技术,设计了一种新的MEMS微型惯性电学开关.

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A silicon integrated thin - film microelectrode device was developed by using silicon micromachining techniques.

提出用发展中的硅微机械加工技术设计制作硅一体化薄膜微电极器件.

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