As we shrink MEMS to NEMS, device physics becomes increasingly dominated by the surfaces.

当我们把尺寸从mems缩小到NEMS时, 表面在元件物理的地位就变得越加重要.

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NEMS sensors are the electro - mechanical sensors, whose characteristic dimensions are in nanometers.

纳机电传感器指基于纳机电效应的 、 其特征尺寸在纳米级的传感器.

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