An experimental double - beam and double - exposure interference photolithographic system has been established.
建立了双光束双曝光干涉光刻实验系统.
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These filters can be fabricated by photolithographic or electro - deposition techniques with high accuracy and repeatability.
这种滤波器能通过电铸方法制造,具有准确性和可重复性.
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Photolithographic patterning and thin film deposition were used for manufacturing multilevel diffractive optical element ( DOE ) .
应用光刻和薄膜沉积技术,制作了多级衍射 光学元件.
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