A temperature sensor based single crystal silicon diaphragm was proposed and studied.

理论分析了单晶硅膜温度传感的机理,通过计算得到了硅膜厚度与温度测量范围之间的关系.

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The drawing of single crystal silicon in a closed thermal system is described.

本文介绍采用密闭热系统拉晶工艺拉制硅单晶的情况.

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Diamond - like carbon ( DLC ) films were prepared on the single crystal silicon substrate by way of DC - RFPECVD.

采用射频 - 直流等离子体增强 化学气相沉积 技术在单晶硅衬底上沉积了类金刚石薄膜.

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Copper nanocrystallites were deposited on mechanically polished single crystal silicon ( sc - Si ) wafers by electroless deposition method.

采用无电镀沉积技术在经过机械抛光的 单晶硅衬底 上沉积了铜纳米晶.

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