A double - ended tuning fork resonator is presented , which is fabricated by silicon bulk micromachining technology.

应用体硅微机械加工技术, 制作了一种双端固定音叉式谐振器.

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Back etching type AIN film bulk acoustic resonators were fabricated using silicon bulk micromachining technique.

采用体硅微细加工工艺制备了背空腔型AIN薄膜体声波谐振器.

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