Silicon integrated thin film microelectrode based electrochemical sensor devices has been fabricated using silicon micromachining techniques.

研究讨论了硅一体化微机械结构型薄膜微电极电化学传感器件的稳定性及其相关的电化学问题.

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A silicon integrated thin - film microelectrode device was developed by using silicon micromachining techniques.

提出用发展中的硅微机械加工技术设计制作硅一体化薄膜微电极器件.

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