Application of time - optimal auto - alignment system in DSW photolithog - raphic process is investigated in this paper.

本文研究了最 短时 问控制系统在DSW光刻机自动对准系统中的应用问题.

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Application of time - optimal auto - alignment system in DSW photolithog - raphic process is investigated in this paper.

本文研究了最 短时 问控制系统在DSW光刻机自动对准系统中的应用问题.

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A solution to real - time optimal load dispatching problem of power plant was introduced in this paper.

介绍一种解决 实时 厂级负荷优化分配问题的方法.

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The time optimal feedback control is one of variable structure controls, whose sliding - curve is its switching - curve.

最速反馈控制是以其开关曲线为滑动曲线的变结构控制.

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