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It has advantages of sample structure, low damage and anisotropic etching.
该装置具有结构简单, 低损伤和各向异性刻蚀的优点.
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This paper has Studied anisotropic etching mechanism of St in KOH scution by using collision theory.
本文应用碰撞理论研究了硅在KOH溶液中各向异性腐蚀的机理.
各向异性刻蚀???
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